静電容量を利用した超精密加工用砥石の非接触式アライメント調整法

概要

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The study proposes a non-contact adjustment method of grinding wheel alignment in ultra-precision grinder by using electric capacitance between grinding wheel and master ball. Cemented carbide with almost no binder is used for die material as molding glass lens. The carbide is one of the most difficult-to-cut materials because of its high hardness. Diamond wheel therefore is generally used for grinding the material under quite light grinding conditions such as less than 1 micrometer of depth of cut. In such ultraprecision grinding, an alignment and a radius of the grinding wheel must be settled precisely to achieve high efficient grinding. In ultra-precision grinding, grinding and measuring are repeated several times, that is, after grinding the work form is measured, and the result is used to correct a grinding program for next grinding. The method proposed in this study is based on an electric capacitance between grinding wheel having conductivity and the master ball, this means that the method is carried out without any contact between the wheel and the master. The capacitance is in inverse proportion to the gap, and that can be measured precisely. Using the method, the alignment and the radius of the wheel can be adjusted within short time.
公益社団法人精密工学会の論文
2004-06-05