誘導電流を利用した超精密研削加工のモニタリング

概要

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This paper proposes a newly developed monitoring system for grinding ultra-precision small size casting die having asphericl surface. Small size aspheric glass lenses are widely used for IT industry. The lenses are cast in cemented carbide die because of its high melting temperature and the die is usually ground by small size diamond grinding wheels. The wheel can not be changed or dressed in finish grinding, because changing or dressing the wheel brings deterioration of die accuracy, therefore, very light grinding conditions must be adopted, such as less than one micrometer of depth of cut. In such conditions, monitoring of grinding state, such as that of grinding force, is indispensable to achieve high quality and high efficient grinding. However sensing of very low grinding force is quite difficult, because of the system stability and Signal/Noise ratio in the sensing. In the system developed, an induced current was applied to a closed circuit, which was consisted from die, diamond wheel, spindle, air bearing and machine tool, by a ring coil coupling with the circuit and the current was detected by an another ring coil. The current was depended on an impedance of the circuit, and the impedance was influenced by the conditions between die and grinding wheel, Stable or unstable grinding conditions was detected, so that high efficiency ultra-precision grinding was achieved by using the system.
公益社団法人精密工学会の論文
2004-12-05