スペックル干渉計でのモジュレーション変動下の連続大変形計測

概要

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We propose a new method which can measure large changing deformation phases with a speckle interferometry. In a large object deformation, modulations of light intensity change in speckle interferometry often fluctuate , then the modulations can not be assumed, even-roughly, constant over the deformation. In the proposed changing-phase measurement method, large number of changing speckle images during the deformation are continuously captured. A few-tens continuing frames are extracted from all the captured frames, and modulations are estimated over the extracted frames. The estimated modulations and light intensity changes are used to calculate deformation phases and also the final phases in the extracted frame. These calculating process are repeated over all the captured frames. With this method we can measure deformation more than 200μ m.
社団法人精密工学会の論文
2002-10-05