ラジアルシェア干渉計を用いる粗面の形状計測

概要

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A new shape measurement method of rough suface is proposed. The method utilizes a radial shearing interferometry consisting of two zoom lenses with different magnifying powers and a laser diode being able to change its wavelength in a small range less than 0.1nm. The radial shearing interferometry, kuown as a kind of common path interferometer, is capable of obtaining a very stable specklegram even under normal vibrational circumstance. From the specklegrams two phase maps corresponding to two slightly different laser wavelengths are extracted. The difference of phase values between two maps is nearly independent of random speckle phase, but depends on optical path differences. Then shape of the rough suface can be calculated from the two phase maps through the optical path differences. The validity of the method is experimentally demonstrated.
社団法人精密工学会の論文
2000-08-05