位相シフトしながら連続取込みしたスペックル画像を用いる高精度位相測定

概要

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A new technique which can measure speckle phase with high accuracy is proposed. The technique continuously captures about 1OO images under slow phase-shifting and then calculates phase data about each captured image. The calculated phase data are averaged along the capturing order to suppress the noise components due to air fluctuation and vibration of circumstance. Only the average , without other filtering, is not enough to suppress noise which are caused by low modulation data in specklegrams . Therefore , the average is combined with the data replaeing which replaces low modulation data with high modulation data around them. The well-known median filter is also combined. With the combined method the fluetuation of phase data is extremely improved. Utility of the combined method is demonstrated through a practical deformation measurement
社団法人精密工学会の論文
1999-08-05