振動環境下で撮影された干渉像からの高精度位相抽出

概要

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Vertical-scanning shape-measurement interferometry using white light cannot be used under vertically vibrating environment. Because, it is required to repeat predefined-length vertical movement with nanometer accuracy and interferogram capturing just after the movement. We developed the technology which can measure the changes of optical path difference (OPD) of an interferometer with nanometer resolution at around 20-μs interval. So, the technology can trigger interferogram capturing at even the moment when predefined-length movement happens to complete at an abnormal timing due to external vibrations. But vibrations in exposure time would change interferogram intensity captured. This change results in non-negligible measurement errors. Then we develop new phase extraction method which utilize history of OPD change in the exposure time and can remove the above errors. Validity of this method is also estimated by computer simulations.
公益社団法人精密工学会の論文