粗微動高精度実装ロボットの開発(第3報) : スカラ型ロボットと微動機構による位置決め実験[英文論文]

概要

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In our previous work, robust control structure based on disturbance observer for a fast and precise fine motion mechanism has been proposed. The functionality of the controller was verified using one axis of precise X-Y table combined with-one axis fine motion mechanism. As a further step in this paper, the approach is extended to two-axes fine motion mechanism with a SCARA robot as a real system to realize the final purpose, that is, the development of high-precision mounting robot. First, the paper introduces a high performance robot system based on a SCABA robot coupled with a fine motion mechanism which was developed in our laboratory. Second, the paper presents a control scheme that enables correction of possible offsets of the end-effector relative to the target and compensation of the oscillations at the end-point. Finally, experimental results show significant improvements in end-point accuracy and settling time achieved by the novel configuration of the coarse/fine robotic system. As a result, a repeatability (30σ) less than 2 pm and the CP positioning error (3σ) less than 4.0 pm were achieved by the coarse/fine robotic system.
公益社団法人精密工学会の論文
2001-07-05