粗微動高精度実装ロボットの開発 (第2報) : 応答特性と粗動機構による外乱を考慮した微動機構の制御

概要

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This paper presents a controller structure for a fast and precise fine positioner which can be attached to the end-effector of a classical industrial robot for assembly tasks. The overall control system consists of three elements : a position loop feedback controller, a feedforward controller, and a disturbance observer for the position loop. A useful method for compensating for the asymmetry and non-linearities of the piezoelectric based system is used as the first step in the design process. The robust feedback controller based on the disturbance observer compensates for external disturbances mainly from the coarse positioner. Precise tracking is achieved by the feedforward controller. Experimental results are presented to demonstrate performance improvement obtained by each element in the proposed robust structure.
公益社団法人精密工学会の論文
2000-10-05