光学的変位検出による高感度プローブの開発(第1報) : 平面内変位検出感度の評価

概要

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This paper proposes a novel probe system to reduce contact force and to keep a workpiece from deformation. In this probe system, a stylus is supported by an elastic hinge. The displacement of stylus tip is measured by an optical detector. The optical detector consists of two QPDs, two lasers and a ball lens. The ball lens is attached to the end of stylus. As the displacement of the ball lens is proportional to that of the stylus tip, the displacement of the ball lens is measured by two QPDs and two lasers to measure three-dimensional displacement of the stylus tip. In this paper, the structure of the probe system and the principle of the optical detector are described, and the experimental results in X-Y plane are shown. In a result of using the optical detector, this probe system can detect the contact with the workpiece with the resolution of 0.1μm.
2001-10-05