平面3自由度インパクト駆動機構の開発(第2報) : 摩擦力制御を利用した移動特性の向上

概要

論文の詳細を見る
Piezoelectric XYγ Positioning device using impulsive force has capabilities of simple construction, no limitation of traverse length and high resolution. The force that maintains the device to be stationary is only static friction force. Furthermore the motion characteristic is extremely influenced by the conditions of sliding surface. In this paper, the friction control devices were manufactured to improve the motion characteristic of the XYγ Positioning device and mounted on the positioning device with three feet of steel ball. These were designed to control the friction force between the each foot and sliding surface individually. As a result, the ratio of movement with three friction control devices to that without one was 1.6 in any directions. The experimental results agreed well with the estimated factor of 1.64. It was demonstrated that the positioning device had capability of a fine positioning less than 0.05μm in translation and 0.6" in rotation. It was able to rotate around any foot by increasing the friction between the sliding suface and one foot that was to be the rotation axis and removing the friction of the others.
公益社団法人精密工学会の論文
1998-03-05