球面ミラーと線状レーザ光を用いた空間座標位置の測定

概要

論文の詳細を見る
A coordinate measurement method is developed which is based on optical triangulation and uses a spherical mirror as a target. Each of the three axes employs a slit-ray laser scanner and a photo-detector to detect the direction of the regular reflection from the target mirror. Since this method detects only the center of curvature of the mirror, it is suitable when the attitude of the target changes, e.g. a robot arm. Moreover, the use of the spherical mirror allows precise calibration and easy set up. To demonstrate this measurement method, coordinate values in one-dimension were measured at various distances. In this paper, the results form this one dimensional test are presented. The proposed measurement method was shown to be feasible through this experiment. The small beam size and small divergent angle of the light source produced high accuracy, while the detector size was found to have little effect on the accuracy. The measuring accuracy of the system was evaluated to be 20 μm at a distance of 750 mm.
公益社団法人精密工学会の論文
1993-02-05