圧電素子駆動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発(第1報) : 微動トラッキングステーションの開発と性能評価

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Recently it is required to improve the production efficiency and accuracy in the manufacturing factories, where many robots and manipulators are used. Therefore, it is required that the development of measuring method for position and attitude of moving objects with high accuracy. The main purpose of this study is to establish spatial coordinate measuring method using laser tracking station, In this method spatial coordinates are calculated by the principle of triangulation from rotational mirror angles. However, the measuring accuracy of this method depends greatly on the minor angle resolution. Thus, the laser tracking stations are combined with coarse and fine rotational mechanisms to achieve high accuracy spatial coordinate measurement over the wide range and dynamic measurement by using rapid-controlled-mirrors. The aim of this report is to realize the measurement error within 10μm in lxlxlm^3 working space which is a common requirement in manufacturing industry. As the first step, the fine motion mechanism with a two degree-of-freedom was developed. In order to track laser beams to the targets attached on the moving object, the three piezoelectric actuators control mirror angles with high speed and high accuracy. Operating the fine motion unit, the measurement error was less than 10μm for both one-and two-dimensional coordinates measurement with the distance of 10OOmm between tracking station and target or more. It was confirmed that the measuring system was applicable for the manufacturing industries.
公益社団法人精密工学会の論文
2000-05-05

圧電素子駆動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発(第1報) : 微動トラッキングステーションの開発と性能評価

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