圧電素子を用いた高剛性多自由度微動機構(第3報) : 簡易型5自由度機構の開発

概要

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Recently, high-precision positioning is increasingly required in precision manufacturing, measuring instrument and so on. The purpose of this study is to develop a new type mechanism which is capable of fine positioning with five DOF, high rigidity and heavy load capability. It consists of three plates and six piezoelectric actuators. Each actuator has a flexible end which is deformed and inclined to perform the motions of X, Y, Z, α and β. with controlled piezo expansions. Since this mechanism has neither guide way nor lubrication, it is operated without friction, wear and backlash. The new principle allows for extremely simple design, operating conditions and high-precision positioning. The maximum displacements were ±2μm in X and Y directions, ±5μm in Z direction and ±20 grad in a and β directions. The positioning errors and motion errors were within ±0.01 pm in translation and ±0.06 μad in rotation which are corresponding to the performance of measurement system. The positioning resolutions for the translation and rotation were less than 10nm and 0.1μad respectively. For external loading of up to 400N, its performances were remained. The settling time was 25ms for each step response of 1μm in X direction and 5 grad in a direction.
公益社団法人精密工学会の論文
1997-02-05