AFMによる窒化けい素超精密研削表面のナノトポグラフィ

概要

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The nanometer scale imaging of ultra-precision ground surface of silicon nitride ceramics generated by using fine grained diamond wheels has been carried out with an atomic force microscope. The main results obtained in this study are summarized as follows : (1)An ultra-precision mirror surface with a roughness of 6-9nmR_<max> can be obtained by using a very fine grain diamond wheel of grain size #10000. The roughness of the mirror surface is affected by the protrusion of grain boundary phase out of Si_3N_4 crystal surface as well as the unevenness of grinding streaks generated by grain cutting edges. (2)There are an infinite number of ultrafine projections with a height of less than 1-2nm on the ultra-precision ground surface. The height of ultrafine projections existed on the bottom surface of cutting edge streaks is less than 1nm, which is lower than that on the other ground surface. (3)These ultrafine projections have slightly an anisotropic geometry in the shape and the distribution. It seems that the anisotropy is closely related to the material removal mechanism in grinding.
公益社団法人精密工学会の論文
1992-09-05