ファインセラミックスの鏡面研削に関する研究(第1報) : 仕上面の生成機構に関する基礎的考察

概要

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In order to make clear the mechanism of surface generation in the mirror finish grinding of fine ceramics, a series of surface grinding tests for silicon carbide and silicon nitride ceramics have been carried out with several fine grain diamond wheels and a topographic characterization of the mirror finished surface has been conducted using an atomic force microscope. Main results are summarized as follows : (1) Even in grinding the brittle materials such as silicon nitride and silicon carbide, the flow-type chips are formed and the very smooth mirror surface is generated, when they are ground using the fine grain diamond wheels with sharp cutting edges. (2) In grinding these ceramics at a constant grinding condition, a transition from ductile to brittle material removal occurs when the mean diamond grain diameter exceeds a critical value. (3) The roughness of the mirror finished surface is affected considerably by the micro-structural factors such as grain boundary phase and inclusions.
社団法人精密工学会の論文
1991-08-05