ファインセラミックスのワンパス鏡面研削法に関する研究(第1報) : ニューメタルボンド微粒ダイヤモンド砥石の試作と鏡面研削への応用

概要

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In this study, a high-efficiency mirror finishing method which is named"one-pass mirror finish grinding" has been discussed, in which the mirror finishing is accomplished by only one pass grinding operation. In this report, a metal bonded fine grain diamond wheel (MU diamond wheel) has been newly developed by using a high tin bronze bond and its grinding performance has been investigated to establish the one-pass mirror finish grinding technology for various fine ceramics. Main results are summarized as follows : (1) In grinding the representative fine ceramics such as Al_2O_3-TiC, SiC and Si_3N_4,the MU diamond wheels can generate the mirror surface with roughness of 30-80 nmR_<max> by only one pass grinding operation, in which the material removal rate reaches 4-10 mm^3/mm・min. (2) As the MU diamond wheels have an excellent ability for keeping the grinding sharpness as well as a high wear resistance, in grinding Al_2O_3-TiC ceramics, they can continue over a long time to generate the mirror surface with roughness of less than 50 nmR_<max> without dressing and in this case the grinding ratio reaches about 400.
社団法人精密工学会の論文
1992-03-05