電気標準用ボビンのリード精度の非接触自動測定

概要

論文の詳細を見る
In order to establish the electric standard system, which was renewed in 1977 in Japan, a precision solenoid for electric standard use, manufactured by winding a copper wire on a quartz bobbin having threads, is required. In the fitrst stage, the lead accuracy of the bobbin was measured using two electric comparator's gauge heads as contact feelers. But this method of measurement has some problems. That is, threads on the bobbin are easy to be damaged during the measurement and it takes a lots of time in the measurement. Therefore, in order to solve these problems, the non-contact feelers are introduced, which consist of microscope, pin photodiode and amplifier. The main results in this reports are as follows : (1) The non-contact measurement of the threads having a large diameter and a small pitch is made possible. (2) The precision of measurement for repeatability expressed by the standard deviation is 0.22μm at maximum. (3) The results in the measurement of cumulative pitch accuracy using non-contact feelers and contact feelers show the same trend in the regression analysis using the method of least squares. (4) The measuring time for cumulative pitch accuracy is shortened to 1/10 compared with that in the case of contact feelers.
公益社団法人精密工学会の論文
1985-09-05