圧電素子駆動ステージの高速整定動作のための入力決定手法

概要

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The method of input control signal determination for rapid positioning is proposed. A fine motion stage has been developed for an inspection system of TAB (Tape Automated Bonding) type lead or other microscopic observation systems. The stage consists of flexure hinges driven by piezoelectric actuators, however, it lacks in motion damping. In order to obtain the fast settling motion without aids of damping elements, a numerical simulation in consideration of nonlinear factors such as discrete DAC signal, PZT hysteresis, amplifier delay and non-linear spring, is developed. The input control signals are optimized by a gradient method. To avoid the vibrating solutions which may result in divergence, the rank of a gradient matrix of objective function is reduced, and then the general inverse of Moore Penrose is obtained. It is found by several experiments that the fast settling motions are realized with the optimized input signals.
社団法人日本機械学会の論文
2001-03-25