低光子エネルギー及び低光電流における半導体薄膜のCPM特性測定装置

概要

論文の詳細を見る
A constant photocurrent method (CPM) system is developed for characterization of narrow-gap semiconductor films such as hydrogenated amorphous germanium (a-Ge : H), in which optical absorption spectra extend to low photon energy and photocurrent is significantly low in S/N (signal to noise ratio). Sufficient care is taken to enhance light intensity at the low photon energy in an optical system. The whole system is controlled by a personal computer to detect the low photocurrent using large time-constant integration. An empirical relation between lamp voltage and photocurrent at a fixed wavelength is adopted to reduce a measuring time. It is claimed that a photoresponse of pyroelectric detector should be flat in wavelength in order to obtain accurate CPM spectra. Preliminary results for a-Ge : H are also described.
東京工芸大学の論文
1994-01-31