高性能水素離脱測定装置

概要

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The paper concerns a hydrogen evolution measuring system which adopts a minimized sample tube, VCR metal-sealing gaskets in a whole sampling system and personal-computerized temperature control and data processing. The quartz sample tube of 5mm diam. and 85mm length is welded to a Pylex glass of glass-metal transition tube having a VCR joint at a metal end. The heating rate can be varied from 0.6℃/min to 60℃/min and kept constant within ±10% for the rate more than 5℃/min except for a start of H-evolution, using ramp-function generated by PC for a set-point and PID control algorithm. The minimum weight, of the sample i. e. a-Ge : H with hydrogen content of 10 at. % is estimated to be 3μg from the back-ground pressure of 1.4mTorr at 800℃. Its consistency with the experimental observation is discussed reffering to molecular hydrogens trapped in the film. A preliminary observation of H-evolution spectra of a-Ge : H film produced by ECR plasma CVD also is described.
東京工芸大学の論文
1997-01-31