磁気フィルターによるバケット型プラズマ源内のプラズマパラメータの制御

概要

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The technique to control plasma parameters spatially, especially energy distribution and density of electrons, is studied experimentally with magnetically filtered multicusp source. We have found that plasma parameters vary across the filter abruptly. Namely, magnetic filter field devides plasma volume into two regions, i.e. source plasma region and diffused plasma region. The source plasma is high density and high temperature plasma with fast electrons. The diffused plasma is low density and low temperature plasma, because filter field allows the passage of only low-energy electrons to this region. For different two gas species (H_2,Ar) and for various gas pressures (0.6∿6×(10)^<-3> Torr), the same filter effect mentioned above appears remarkably. Besides these, as an example of controlling plasma with the use of magnetic filter, we confirm that extracted H^- current is enhanced when the magnetic filter is close to the extraction plate.
山口大学の論文