磁気フィルターによる電子エネルギー分布の空間的制御

概要

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With the use of both a movable magnetic filter and a plasma grid, the technique to control plasma parameters (including the electron energy distribution function) spatially in a multicusp plasma source has been investigated experimentally. The magnetic filter field makes plasma parameters vary abruplty across the filter, so that the plasma source is divided into two region, i.e. a source plasma region (high density plasm with energetic electrons) and a diffused plasma region (low temperature plasma without energtic electrons). The source plasma is suited for production of the reactive species, and the diffused plasma is suited for deposition of thin films. But the strength of the magnetic filter has great influence on controlling plasma parameters. It is also confirmed that, by changing the plasma grid potential, the plasma parameters in the diffused plasma region are controlled well.