プラズマジェット中に注入された粒子の加熱・冷却過程の解析

概要

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In the plasma processing with plasma jet reactors, powder materials are injected into the plasma flow. Then it is important to study interaction between the plasma flow and injected powder particles. In this paper, by using a single particle model for processing, we have calculated the temperature and the trajectry of the particle injected into the plasma flow at different pressures (760Torr, 100Torr) with various particle diameters (5μm∿20μm). According to the numerical results, particle heating and cooling depend strongly on the pressure in the reactor. At 760 Torr all paticles are heated up to boiling point in the feed ring and cooled rapidly out of the feed ring. On the other hand at 100 Torr the particles whose diameters are larger than 15μm can't be reached boiling point in the feed ring and they keep high temperature above melting point in the down stream region far from the feed ring exit. Numerical results are also compaired with experimental ones.