プラズマジェットを用いた減圧下での高融点材料処理

概要

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In order to demonstrate the application feasibility of the reactor composed of a forced constricted type DC plasma jet generator and a feed ring to low pressure plasma processing, we have studied the production of ultrafine particles of refractory materials (Al_2O_3, ZrC, TiC) and the interaction between the plasma flow and the injected particles. According to the experimental results, many ultrafine particles whose diameters are less than 0.1μm are prepared not only in atmospheric pressure but also in low pressure, although the number density of the prepared ultrafine particles, N, in low pressure is usually less than that in atmospheric pressure. It is also found that we can control the process of particle heating by changing the feed ring length, and that N in low pressure becomes equal to or greater than N in atmospheric pressure with increasing the feed ring length.
電気学会の論文