The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films
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概要
- 論文の詳細を見る
- 2012-11-01
著者
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Lui T.
Department Of Materials Science And Engineering Institute Of Nanotechnology And Microsystems Engineering Center For Micro/nano Science And Engineering National Cheng Kung University
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Hung F.
Department Of Materials Science And Engineering Institute Of Nanotechnology And Microsystems Engineering Center For Micro/nano Science And Engineering National Cheng Kung University
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Chen K.
The Instrument Center National Cheng Kung University
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Chang S.
Institute Of Electro-optical Science And Engineering National Cheng Kung University
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Chen L.
Department of Applied Chemistry Faculty of Engineering The University of Tokyo
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CHEN L.
Department of Materials Science and Engineering, Center for Micro/Nano Science and Engineering, National Cheng Kung University
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HU Z.
Institute of Microelectronics & Department of Electrical Engineering, National Cheng Kung University
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