走査マルチプローブ顕微鏡を使ったナノワイヤーの電気輸送特性計測

概要

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We have developed multiple-scanning-probe microscope (MPSPM) to measure electrical transport properties of nanoscale conductors. Versatility of MPSPM are shown through the measurements of nanowires (NWs), in which two independently driven probes need to make nanosized contact to the measuring object and obtain its image with the probes themselves. Electrical measurements have been performed on metal-silicide NWs epitaxially formed on Si(001) substrate. Interesting phenomena unique to nanoconductors, such as large resistance induced by inelastic surface scattering, are observed. Tungsten-suboxide nanorods epitaxially grown on electrochemically-etched tungsten tips are used as MPSPM probes. By using the nanorod probes, unusual resistance change is detected in the electrical measurements, which would be related to electron mean free path.
2008-07-20