Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-Axis Vibration and X, Y Bi-Directional Tilting, and an Application to Low Coherent Optical Interferometer

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概要

• 論文の詳細を見る

• This paper presents development of an optical MEMS mirror device and an application to low coherence interferometry. This device can vibrate ±0.9μm along Z-axis under resonant frequency (5.24Vpp, 28.48kHz) for lock-in detection, and can tilt to X, Y bi-direction (Optical angle X:±10.6°/±10mA, Y:±5.2°/±10mA) for 2-D scanning and optical axis alignment by electromagnetic force between planar coils and a permanent magnet. In addition, developed MEMS mirror is embedded to a time-domain low coherent interferometer with a super luminescent diode (λc: 832nm, Δλ: 14.7nm) for optical axis alignment and lock-in detection, and the thickness and refractive index of a glass plate have been evaluated with low noise.

• 社団法人 電気学会の論文
• 2008-03-01

著者

• Sato Toshiyuki

  Yamagata Research Institute Of Technology

• Mitsui Toshiaki

  Yamagata Research Institute Of Technology

• Iwamatsu Shinnosuke

  Yamagata Research Institute Of Technology

• ABE Yutaka

  Yamagata University

• WATANABE Yoshiyuki

  Yamagata Research Institute of Technology

• TAKAHASHI Yoshiyuki

  Yamagata Research Institute of Technology

• Abe Yutaka

  Yamagata Research Institute Of Technology

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