Improving Electrical Properties and Thermal Stability of (Ba,Sr)TiO_3 Thin Films on Cu(Mg) Bottom Electrodes

スポンサーリンク

概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-06-30

著者

• CHAO Chuen-Guang

  Department of Materials Science and Engineering, National Chiao-Tung University

• Lee Jain-tsai

  Department Of Materials Science And Engineering National Chiao-tung University

• Wu Wen-fa

  National Nano Device Laboratories

• SHEN Shih-Wen

  National Nano Device Laboratory

• TSAI Kou-Chiang

  Department of Materials Science and Engineering, National Chiao Tung University

関連論文

• Magnetic and Optical Properties of Isolated Magnetite Nanocrystals
• Effects of rhenium on microstructure and phase stability of MAR-M247 Ni-base fine-grain superalloy
• Effects of Rhenium on Microstructure and Phase Stability of MAR-M247 Ni-Base Fine-Grain Superalloy
• Improvements on Electrical Characteristics of p-Channel Metal-Oxide-Semiconductor Field Effect Transistors with HfO_2 Gate Stacks by Post Deposition N_2O Plasma Treatment
• Effect of the Tantalum Barrier Layer on the Electromigration and Stress Migration Resistance of Physical-Vapor-Deposited Copper Interconnect
• Effect of Aluminum Seed Layer on the Crystallographic Texture and Electromigration Resistance of Physical Vapor Deposited Copper Interconnect
• Impacts of Cu/TaN Electrode on the Electrical Properties of Metal-insulator-metal (Ba,Sr)TiO_3 Thin-film Capacitors
• Improving Electrical Properties and Thermal Stability of (Ba,Sr)TiO_3 Thin Films on Cu(Mg) Bottom Electrodes
• Repairing of Etching-Induced Damage of High-k Ba_Sr_TiO_3 Thin Films by Oxygen Surface Plasma Treatment
• Formation Procedure and Microstructural Analysis of Pb_7Bi_3 (Pb-Bi) Alloy Nanowires
• Nanoparticles of Pb-Bi Eutectic Nucleation and Growth on Alumina Template
• Improving Characteristics of Tantalum Oxide Thin Film Devices with Copper Electrodes
• Effect of Nitrogen Plasma Treatment on Electrical Characteristics for Pd Nanocrystals in Nonvolatile Memory
• A Novel Method for the Preparation of Si Nanowires
• Effect of Thermal Annealing or Plasma Treatment on Analog Characteristics for High-$k$ Material Capacitors
• Improving Electrical Properties and Thermal Stability of (Ba,Sr)TiO3 Thin Films on Cu(Mg) Bottom Electrodes
• Repairing of Etching-Induced Damage of High-$k$ Ba0.5Sr0.5TiO3 Thin Films by Oxygen Surface Plasma Treatment

もっと見る 閉じる

スポンサーリンク