Impacts of Cu/TaN Electrode on the Electrical Properties of Metal-insulator-metal (Ba,Sr)TiO_3 Thin-film Capacitors

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概要

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2007-09-19

著者

CHAO Chuen-Guang
Department of Materials Science and Engineering, National Chiao-Tung University
Wu Chi-chang
Department Of Electronic Engineering Feng-chia University
Lee Jain-tsai
Department Of Materials Science And Engineering National Chiao-tung University
Wu Wen-fa
National Nano Device Laboratories
Chao Chuen-guang
Department Of Materials Science And Engineering National Chiao-tung University
Jheng Guo-shen
Department Of Electronic Engineering National Yunlin University Of Science And Technology
TSAI Kou-Chiang
National Nano Device Laboratories
CHANG Wei-Che
Department of Electronic Engineering, Feng-Chia University
KANG Tsung-Kuei
Department of Electronic Engineering, Feng-Chia University
LIN Jian-Yang
Department of Electronic Engineering, National Yunlin University of Science and Technology
Lin Jian-yang
Department Of Electronic Engineering National Yunlin University Of Science And Technology
Chao Chuen-guang
Department Of Material Sciences And Engineering National Chiao Tung University
Kang Tsung-kuei
Department Of Electronic Engineering Feng-chia University
Lin Jian-yang
Department of Electrical Engineering, National Chung Cheng Institute of Technology

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