Annealing Behavior of Low-Temperature-Deposited SrTiO_3 Capacitor
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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TANAKA Tsuyoshi
Electronics Research Laboratory, Matsushita Electronics Corporation
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UEDA Daisuke
Electronics Research Laboratory, Matsushita Electronics Corporation
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Ueda Daisuke
Electronics Research Laboratory Matsushita Electronics Corporation
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NISHITSUJI Mitsuru
Electronics Research Laboratory, Matsushita Electronics Corporation
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TAMURA Akiyoshi
Electronics Research Laboratory, Matsushita Electronics Corporation
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INOUE Kaoru
Electronics Research Laboratory, Matsushita Electronics Corporation
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Tamura A
Electronics Research Laboratory Matsushita Electronics Corporation
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Nishitsuji M
Matsushita Electronics Corp. Nagaokakyo‐shi Jpn
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Nishitsuji M
Semiconductor Research Center Matsushita Electric Industrial Co Ltd.
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Tanaka Tsuyoshi
Electronics Research Laboratory Matsushita Electronics Corporation
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