Defect Termination by Nitrogen Bonding due to NO Nitridation in MOS Structures
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Kikawa Takeshi
Central Research Laboratory, Hitachi Ltd.
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WATANABE Kikuo
Central Research Laboratory, Hitachi Ltd.
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Kikawa Takeshi
Central Research Laboratory Hitachi Ltd.
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Kushida Abdelghafar
Central Research Laboratory Hitachi Ltd.
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Murakami Eiichi
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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KAMIGAKI Yoshiaki
Central Research Laboratory, Hitachi, Ltd.
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Watanabe Kikuo
Central Research Laboratory Hitachi Ltd.
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Kamigaki Yoshiaki
Central Research Laboratory Hitachi Ltd.
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KIKAWA Takeshi
Central Research Laboratory, Hitachi, Ltd.
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