多孔薄膜電極を用いたイオンドラッグマイクロポンプの研究

スポンサーリンク

概要

論文の詳細を見る
We have developed the DC drive ion drag micro pump of 100μm order thickness with the perforated thin film semicovered electrode which was suitable for miniaturization. Accelerating electrodes for positive and negative ion were alternately placed, and a half of each electrode was covered with polyimide film. The operating liquid was a mixture of silicon oil and octyl alcohol. Pressure generated from the insulation side to the naked electrode side in one direction regardless of polarity of the input voltage. The drive voltage to be necessary for same pressure was reduced by increasing the number of the electrodes. And we suggested new flow mechanism of multistage ion drag micro pump based on an experimental result. Furthermore, we examined problems and a solution when we narrowed distance between electrodes as fundamental researches for miniaturization of ion drag micro pump.
社団法人電気学会の論文
2005-06-01

著者

関連論文

もっと見る

スポンサーリンク