Topography and Local Electrical Properties of Nondoped Polycrystalline Silicon Thin Films Evaluated Using Conductive-Mode Atomic Force Microscopy

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-11-01

著者

• YAMASAKI Satoshi

  National Institute for Advanced Interdisciplinary Research

• Yamasaki Satoshi

  National Institute Of Advanced Industrial Science And Technology (aist)

• Ando Atsushi

  National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn

• Aya Yoichiro

  Materials And Devices Development Center Bu Sanyo Electric Co. Ltd.

• WAKISAKA Kenichiro

  Materials and Devices Development Center BU, Sanyo Electric Co., Ltd.

• Wakisaka K

  Sanyo Electric Co. Ltd. Hirakata‐shi Jpn

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