Characteristics of n-GaN After Cl_2/Ar and Cl_2/N_2 Inductively Coupled Plasma Etching
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-10-15
著者
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Luo Yi
State Key Laboratory On Integrated Optoelectronics Tsinghua National Laboratory For Information Scie
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Sun C‐z
State Key Laboratory On Integrated Optoelectronics Tsinghua National Laboratory For Information Scie
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Sun Chang-zheng
State Key Lab On Integrated Optoelectronics Dept. Of Electronic Engineering Tsinghua University
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HAO Zhi-Biao
State Key Lab on Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua Universi
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Hao Z‐b
State Key Lab On Integrated Optoelectronics Dept. Of Electronic Engineering Tsinghua University
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Hao Zhi-biao
State Key Lab On Integrated Optoelectronics Department Of Electronic Engineering Tsinghua University
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Luo Yi
National Integrated Optoelectronics Laboratory Department Of Electronic Engineering Tsinghua Univers
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Luo Yi
University Of Pennsylvania School Of Veterinary Medicine Department Of Clinical Studies
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Luo Yi
State Key Lab On Integrated Optoelectronics Department Of Electronic Engineering Tsinghua University
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HAN Yan-Jun
State Key Lab on Integrated Optoelectronics, Dept. of Electronic Engineering, Tsinghua University
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XUE Song
State Key Lab on Integrated Optoelectronics, Dept. of Electronic Engineering, Tsinghua University
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GUO Wen-Ping
State Key Lab on Integrated Optoelectronics, Dept. of Electronic Engineering, Tsinghua University
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Han Yan-jun
State Key Lab On Integrated Optoelectronics Dept. Of Electronic Engineering Tsinghua University
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Guo Wen-ping
State Key Lab On Integrated Optoelectronics Dept. Of Electronic Engineering Tsinghua University
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Sun C
State Key Laboratory On Integrated Optoelectronics Tsinghua National Laboratory For Information Scie
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Sun Chang-zheng
State Key Lab Of Integrated Optoelectronics Department Of Electronic Engineering Tsinghua University
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Xue Song
State Key Lab On Integrated Optoelectronics Dept. Of Electronic Engineering Tsinghua University
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Luo Yi
State Key Lab of Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua University
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