Highly Selective Dry Etching of GaN over AlGaN Using Inductively Coupled C1_2/N_2/0_2 Plasmas
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2003-10-01
著者
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Luo Yi
State Key Laboratory On Integrated Optoelectronics Tsinghua National Laboratory For Information Scie
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HAN Yanjun
State Key Laboratory on Integrated Optoelectronics/Tsinghua National Laboratory for Information Scie
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Luo Yi
National Integrated Optoelectronics Laboratory Department Of Electronic Engineering Tsinghua Univers
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SUN Changzheng
State Key Lab of Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua Universi
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XUE Song
State Key Lab on Integrated Optoelectronics, Dept. of Electronic Engineering, Tsinghua University
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HAO Zhibiao
State Key Laboratory on Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua U
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GUO Wenping
State Key Laboratory on Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua U
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