Characteristics of Superconducting Nb Layer Fabricated Using High-Vacuum Electron Beam Evaporation
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概要
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We have fabricated a niobium (Nb) layer for a Josephson junction by means of a high-vacuum electron beam (EB) evaporation technique. The high-vacuum EB-evaporated Nb layer is deposited under the base pressure of $4\times 10^{-9}$ Pa and the deposition rate of 1.2 nm/min. In spite of the extremely low deposition rate, Nb layers of over 50 nm thickness have the transition temperature of 9.3 K and the ratio of residual resistivity of more than 3. The surface roughness and the grain size of the high-vacuum EB-evaporated Nb layer are studied using atomic force microscopy and X-ray diffraction analysis. The stress in the high-vacuum EB-evaporated Nb layers is examined by measuring the change in the radius of curvature of the substrate before and after Nb layer deposition, and the X-ray diffraction patterns of the Nb layers. The high-vacuum EB-evaporated Nb layer exhibits a weak tensile stress.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-15
著者
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NOGUCHI Takashi
Nobeyama Radio Observatory, National Astronomical Observatory of Japan
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NAKAYAMA Noriaki
Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi Universi
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HARADA Keita
Department of Gastroenterology and Hepatology, Okayama University Graduate School of Medicine, Denti
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Nakayama Noriaki
Department Of Advanced Materials Science And Engineering Faculty Of Engineering
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Nakayama Noriaki
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Harada K
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Harada Keita
Department Of Biology Faculty Of Sience Osaka City University
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TAKEDA Norihisa
Department of Functional Morphology, Nagoya City University Graduate School of Medical Sciences
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Morohashi Shin’ichi
Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi Universi
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Tsujimura Shogo
Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi Universi
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Kawanishi Masanori
Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi Universi
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Maekawa Shoji
Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi Universi
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Kawanishi Masanori
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Tsujimura Shogo
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Maekawa S
Japan Aerospace Exploration Agency Mitaka Jpn
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Takeda Norihisa
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Noguchi Takashi
Nobeyama Radio Observatory
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HARADA Keita
Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
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