Preparation of Thin Palladium Membranes by a Novel Method Based on Photolithography and Electrolysis
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概要
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A negative resist was spin-coated on the surface of a 50-μm thick copper film, and was solidified as a protection film. A palladium layer was then electrodeposited on the other uncovered surface. After removing the protection film, the resist was again spin-coated on the copper surface, and a pattern of microslits was transferred by photolithography. After development, the microslits were electrolytically etched out. Thus a palladium membrane of 5 mm in diameter was formed as an assemblage of thin layers formed in the microslits. The palladium membranes prepared were characterized by SEM observation, as well as by permeation measurements for hydrogen and nitrogen at 573-873 K. The palladium membrane, which was 3 μm in thickness and formed on a polished copper film, showed separation factor of hydrogen to nitrogen of 120 at 873 K.
- 社団法人 化学工学会の論文
著者
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TAKAHASHI MAKOTO
Department of Food Science and Technology, Kyoto University
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KUSAKABE Katsuki
Department of Living Environmental Science, Fukuoka Women's University
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Maeda Hideaki
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology
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草壁 克己
福岡女子大学人間環境学部
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MOROOKA Shigeharu
Department of Materials Physics and Chemistry, Graduate School of Engineering, Kyushu University
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Maeda Hideaki
Department Chemistry & Biochemistry Graduate School Of Engineering Kyushu University
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Kusakabe Katsuki
Department Of Applied Chemistry Graduate School Of Engineering Kyushu University
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Morooka Shigeharu
Department Of Applied Chemistry Kyushu University
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Takahashi Makoto
Department Of Coloproctological Surgery Juntendo University Faculty Of Medicine
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Takahashi Makoto
Department Of Applied Chemistry College Of Engineering Chubu University
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