A Practical Method for Rapid Microchannel Fabrication in Polydimethylsiloxane by Replica Molding without Using Silicon Photoresist

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概要

• 論文の詳細を見る

• This paper describes a very simple and rapid method for fabrication of microfluidic devices on the material polydimethylsiloxane (PDMS). The fabrication process is greatly simplified by using a micromachined polymethylmethacrylate (PMMA) master instead of using a silicon photoresist. A PDMS pre-polymer mixture was cast over the PMMA master and cured to produce positive relief structures in PDMS which then served as a mold. This PDMS mold was conveniently used for multiple production of PDMS replicas containing the desired microstructures similar to those on the surface of the original PMMA master. Because our procedure does not require a photoresist, it minimizes the requirement for special equipment and decreases the total fabrication time. Moreover, the method offers the advantage of a wide range of feature size, specifically deeper channels unobtainable with silicon photoresist. Examination of the sidewalls of the channels revealed high fidelity in reproducing the PMMA master via the hardened-PDMS mold. Our protocol enables the production of multiple PDMS-based microfluidic devices in a low-cost and efficient manner.

• 社団法人 化学工学会の論文
• 2006-10-01

著者

• Honda Takeshi

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (

• Nakamura Hirotaka

  Institute For Fundamental Research Of Organic Chemistry Kyushu University

• Briones Maria

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology

• Nomura Hideyuki

  Institute Of Fundamental Research For Organic Chemistry Kyusyu University

• Nakamura H

  Micro- & Nano-space Chemistry Group Nanotechnology Research Institute National Institute Of Adva

• Maeda Hideaki

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology

• Miyazaki M

  Aist Kyushu National Institute Of Advanced Industrial Science And Technology

• MIYAZAKI Masaya

  Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology

• YAMAGUCHI Yoshiko

  Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology

• NAKAMURA Hiroyuki

  Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology

• Honda Takeshi

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology

• Miyazaki Masaya

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology

• Miyazaki Masaya

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (

• Maeda Hideaki

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (

• Miyazaki Masaya

  Measurement Solution Research Center National Institute Of Advanced Industrial Science And Technolog

• Yamaguchi Yoshiko

  Micro- & Nano-space Chemistry Group Nanotechnology Research Institute National Institute Of Adva

• Nakamura H

  Micro- & Nano-space Chemistry Group Nanotechnology Research Institute National Institute Of Adva

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