A Practical Method for Rapid Microchannel Fabrication in Polydimethylsiloxane by Replica Molding without Using Silicon Photoresist
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概要
- 論文の詳細を見る
This paper describes a very simple and rapid method for fabrication of microfluidic devices on the material polydimethylsiloxane (PDMS). The fabrication process is greatly simplified by using a micromachined polymethylmethacrylate (PMMA) master instead of using a silicon photoresist. A PDMS pre-polymer mixture was cast over the PMMA master and cured to produce positive relief structures in PDMS which then served as a mold. This PDMS mold was conveniently used for multiple production of PDMS replicas containing the desired microstructures similar to those on the surface of the original PMMA master. Because our procedure does not require a photoresist, it minimizes the requirement for special equipment and decreases the total fabrication time. Moreover, the method offers the advantage of a wide range of feature size, specifically deeper channels unobtainable with silicon photoresist. Examination of the sidewalls of the channels revealed high fidelity in reproducing the PMMA master via the hardened-PDMS mold. Our protocol enables the production of multiple PDMS-based microfluidic devices in a low-cost and efficient manner.
- 社団法人 化学工学会の論文
- 2006-10-01
著者
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Honda Takeshi
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (
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Nakamura Hirotaka
Institute For Fundamental Research Of Organic Chemistry Kyushu University
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Briones Maria
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology
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Nomura Hideyuki
Institute Of Fundamental Research For Organic Chemistry Kyusyu University
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Nakamura H
Micro- & Nano-space Chemistry Group Nanotechnology Research Institute National Institute Of Adva
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Maeda Hideaki
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology
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Miyazaki M
Aist Kyushu National Institute Of Advanced Industrial Science And Technology
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MIYAZAKI Masaya
Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology
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YAMAGUCHI Yoshiko
Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology
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NAKAMURA Hiroyuki
Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology
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Honda Takeshi
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology
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Miyazaki Masaya
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology
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Miyazaki Masaya
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (
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Maeda Hideaki
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (
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Miyazaki Masaya
Measurement Solution Research Center National Institute Of Advanced Industrial Science And Technolog
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Yamaguchi Yoshiko
Micro- & Nano-space Chemistry Group Nanotechnology Research Institute National Institute Of Adva
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Nakamura H
Micro- & Nano-space Chemistry Group Nanotechnology Research Institute National Institute Of Adva
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