スポンサーリンク
Department of Nanomechanics, Graduate School of Engineering, Tohoku University | 論文
- A high-resolution endoscope of small diameter using electromagnetically vibration of single fiber (特集 医療用MEMSデバイス)
- Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-level Integration of Acoustic Devices and LSI
- Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge(Passive Circuits/Components,Emerging Microwave Techniques)
- Application of Screen-Printed Catalytic E1ectrodes to MEMS-Based Fuel Cells (特集:燃料電池を支えるMEMS/NEMS技術)
- Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
- Micro-Nano Electro Mechanical Systems
- Micro Industry Equipments(Micro Mechanical Engineering)
- A24-041 MICRO INDUSTRY EQUIPMENTS
- Vertical Diaphragm Electrostatic Actuator for a High Density Ink Jet Printer Head
- Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS
- Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS
- Electrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss
- MEMS-Based Solid Propellant Rocket Array Thruster with Electrical Feedthroughs
- Ulitaprecision Machining Characteristics of Poly-Crystalline Germanium
- Ultraprecision Machining Characteristics of Poly-crystalline Germanium(Ultra-precision machining)
- An Efficient Backbone Amide Nitrogen Alkylation of RA-VII, an Antitumor Cyclic Hexapeptide
- Diffusion and Electrical Properties of Iron-Related Defects in N-Type Silicon Grown by Czochralski- and Floating Zone Method
- Iron-Related Donor Level in N-Type Silicon
- Investigation of Ni Induced Deep Levels in N-Type Si by a Temperature Dependence of Piezoelectric Photothermal Signals
- Design and Fabrication of Passive Wireless SAW Sensor for Pressure Measurement