SUGATA Sumio | Optoelectronics Joint Research Laboratory
スポンサーリンク
概要
関連著者
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SUGATA Sumio
Optoelectronics Joint Research Laboratory
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Asakawa Kiyoshi
Optoelectronics Joint Research Laboratory
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Tsukada Noriaki
Optoelectronics Joint Research Laboratory
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MITA Yoh
Optoelectronics Joint Research Laboratory
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HASHIMOTO Hisao
Optoelectronic Joint Research Laboratory
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MIYAUCHI Eizo
Optoelectronics Joint Research Laboratory
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NAKAJIMA Masato
Optoelectronics Joint Research Laboratory
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Miyauchi E
Fujitsu Ltd. Kanagawa
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Semura Shigeru
Optoelectronics Joint Research Laboratory
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Kuramoto Kazuo
Optoelectronics Joint Research Laboratory
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Takamori Akira
Optoelectronics Joint Research Laboratory:(present Address) Matsushita Electric Ind. Co.
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Sugata S
Optoelectronics Joint Research Laboratory
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Hashimoto Masafumi
Optoelectronics Joint Research Laboratory
著作論文
- Cleaning of MBE GaAs Substrates by Hydrogen Radical Beam Irradiation
- GaAs P-Layer Formation by Be Ion Implantation
- GaAs P-N Junction Formation by Carbon Ion Implantation : B-6: III-V DEVICE TECHNOLOGY
- GaAs and GaAlAs Equi-Rate Etching Using a New Reactive Ion Beam Etching System
- Optical Emission Spectrum of Cl_2 ECR Plasma in the GaAs Reactive Ion Beam Etching (RIBE) System
- Investigation of GaAs Surface Morphology Induced by Cl_2 Gas Reactive Ion Beam Etching
- GaAs Radical Etching with a Cl_2 Plasma in a Reactive Ion Beam Etching System