Asakawa Kiyoshi | Optoelectronics Joint Research Laboratory

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概要

関連著者

著作論文

Cleaning of MBE GaAs Substrates by Hydrogen Radical Beam Irradiation
GaAs and GaAlAs Equi-Rate Etching Using a New Reactive Ion Beam Etching System
Optical Emission Spectrum of Cl_2 ECR Plasma in the GaAs Reactive Ion Beam Etching (RIBE) System
Investigation of GaAs Surface Morphology Induced by Cl_2 Gas Reactive Ion Beam Etching
GaAs Radical Etching with a Cl_2 Plasma in a Reactive Ion Beam Etching System

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