Mitani K | Sanyo Electric Co. Ltd. Gifu Jpn

スポンサーリンク

概要

関連著者

もっと見る

著作論文

Heavy-Metal(Fe/Ni/Cu)Behavior in Ultrathin Bonded Silicon-On-Insulator(SOI)Wafers Evaluated Using Radioactive Isotope Tracers
Zero-Field Magnetic Amplifying Magnetooptical System Applied to Next Generation "iD PHOTO" System
Study of HF Defects in Thin, Bonded Silicon-on-Insulator Dependent on Original Wafers
Study of HF Defects in Thin Bonded SOI Dependent on Original Wafers
Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded Silicon on Insulator (SOI) Wafers
Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded SOI Wafers
Detection of Particles on Quarter μm Thick or Thinner SOI Wafers
Detection of Particles on Quarter um Thick or Thinner SOI Wafers
Heavy Metal(Cu/Fe/Ni) Behavior in Ultra thin Bonded SOI Wafers Evaluated by Using Radioactive Isotope Tracers
A New Evaluation Method of Silicon Wafer Bonding Interfaces and Bondinug Strength by KOH Etching

スポンサーリンク