Heavy Metal(Cu/Fe/Ni) Behavior in Ultra thin Bonded SOI Wafers Evaluated by Using Radioactive Isotope Tracers

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概要

• 論文の詳細を見る
• 1999-09-20

著者

• Nakano Masayuki

  National Mito Hospital

• Mitani Kenichiro

  Hypermedia Research Center Sanyo Electric Co. Ltd.

• Nakano Masatake

  Thin Film Soi Group.process Engineering Dept.isobe R&d Shin-etsu Handotai Co. Ltd.

• Mitani K

  Sanyo Electric Co. Ltd. Gifu Jpn

• FURIHATA Jun-Ichiro

  Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.

• MITANI Kiyoshi

  Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.

• Furihata Jun-ichiro

  Thin Film Soi Group.process Engineering Dept.isobe R&d Shin-etsu Handotai Co. Ltd.

• Mitani Kiyoshi

  Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.

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