A New Evaluation Method of Silicon Wafer Bonding Interfaces and Bondinug Strength by KOH Etching

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概要

• 論文の詳細を見る

• KOH anisotropic etching is used to study the interfaces of bonded silicon wafers. This method has been developed to detect the presence of bubbles or unbonded areas with a gap of less than 0.27 μm, which is the detection limit of an IR camera. Because of the anisotropic etching properties of KOH and the presence of interfacial oxide layers, the etching surface morphology is dependent on the crystallographic orientation of the cross section. Correlation of etching results to the bonding strength of silicon wafers with and without a therma11y oxidized silicon layer is also discussed.

• 社団法人応用物理学会の論文
• 1992-04-15

著者

• Feijoo Diego

  School Of Engineering Duke University

• Mitani Kenichiro

  Hypermedia Research Center Sanyo Electric Co. Ltd.

• MITANI Kiyoshi

  School of Engineering, Duke University

• Mitani K

  Sanyo Electric Co. Ltd. Gifu Jpn

• Gosele Ulrich

  School Of Engineering Duke University

• CHA Giho

  School of Engineering, Duke University

• Cha Giho

  School Of Engineering Duke University

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• Study of HF Defects in Thin, Bonded Silicon-on-Insulator Dependent on Original Wafers
• Study of HF Defects in Thin Bonded SOI Dependent on Original Wafers
• Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded Silicon on Insulator (SOI) Wafers
• Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded SOI Wafers
• Causes and Prevention of Temperature-Dependent Bubbles in Silicon Wafer Bonding
• Detection of Particles on Quarter μm Thick or Thinner SOI Wafers
• Detection of Particles on Quarter um Thick or Thinner SOI Wafers
• Heavy Metal(Cu/Fe/Ni) Behavior in Ultra thin Bonded SOI Wafers Evaluated by Using Radioactive Isotope Tracers
• A New Evaluation Method of Silicon Wafer Bonding Interfaces and Bondinug Strength by KOH Etching
• Water-Enhanced Debonding of Room-Temperature Bonded Silicon Wafers for Surface Protection Applications

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