FURIHATA Jun-Ichiro | Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.
スポンサーリンク
概要
関連著者
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Nakano Masayuki
National Mito Hospital
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Mitani Kenichiro
Hypermedia Research Center Sanyo Electric Co. Ltd.
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Nakano Masatake
Thin Film Soi Group.process Engineering Dept.isobe R&d Shin-etsu Handotai Co. Ltd.
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Mitani K
Sanyo Electric Co. Ltd. Gifu Jpn
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FURIHATA Jun-Ichiro
Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.
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MITANI Kiyoshi
Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.
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Furihata Jun-ichiro
Thin Film Soi Group.process Engineering Dept.isobe R&d Shin-etsu Handotai Co. Ltd.
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Mitani Kiyoshi
Thin Film SOI Group.Process Engineering Dept.Isobe R&D Shin-Etsu Handotai Co., Ltd.
著作論文
- Heavy-Metal(Fe/Ni/Cu)Behavior in Ultrathin Bonded Silicon-On-Insulator(SOI)Wafers Evaluated Using Radioactive Isotope Tracers
- Heavy Metal(Cu/Fe/Ni) Behavior in Ultra thin Bonded SOI Wafers Evaluated by Using Radioactive Isotope Tracers