Aga Hiroji | Isobe R&d Center Shin-estu Handotai Co. Lid.

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著作論文

Study of HF Defects in Thin, Bonded Silicon-on-Insulator Dependent on Original Wafers
Study of HF Defects in Thin Bonded SOI Dependent on Original Wafers
Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded Silicon on Insulator (SOI) Wafers
Effective KOH Etching Prior to Modified Secco Etching for Analyzing Defects in Thin Bonded SOI Wafers

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