Sasago Masaru | Matsushita Electric Industrial Co.
スポンサーリンク
概要
関連著者
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Sasago Masaru
Matsushita Electric Industrial Co.
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IRIE Shigeo
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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ENDO Masayuki
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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Kametani Hitoshi
General Research Laboratory Mitubishi Electric Corporation
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Kondo H
The Institute Of Scientific And Industrial Research Osaka University
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ENDO Masamori
Department of Physics, School of Science, Tokai University
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Endo M
Department Of Physics School Of Science Tokai University
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Kondo Hideyuki
Central Research Institute Mitsubishi Materials Corporation
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MURAKAMI Katsuhiko
Nikon Corporation
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SASAGO Masaru
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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Kondo H
Nikon Corp.
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Irie S
Semiconductor Leading Edge Technologies Ibaraki Jpn
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Irie Shigeo
Semiconductor Leading Edge Technologies Inc. (selete)
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Sasago M
Matsuisita Electric Industrial Co. Ltd. Kyoto Jpn
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Matsuo Takahiro
Matsushita Electric Industrial Co. Ltd. (panasonic)
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KANDAKA Noriaki
Nikon Co.
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KONDO Hiroyuki
Nikon Co.
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Sasago M
Assoc. Super‐advanced Electronics Technol. Yokohama Jpn
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Kandaka N
Nikon Corp.
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Sasago M
Matsushita Electric Industrial Corp. Ltd.
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MURAKAMI Katsuhiko
Nikon Corp.
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OCHIAI Yukinori
NEC Fundamental and Environmental Research Laboratories
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NAMATSU Hideo
NTT Basic Research Laboratories
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YUITO Takashi
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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WIAUX Vincent
IMEC vzw
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VAN LOOK
IMEC vzw
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VANDENBERGHE Geert
IMEC vzw
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MISAKA Akio
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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NAKAMATSU Ken-ichiro
Graduate School of Science, LASTI, Himeji Institute of Technology
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WATANABE Keiichiro
Graduate School of Science, LASTI, Himeji Institute of Technology
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TONE Katsuhiko
Graduate School of Science, LASTI, Himeji Institute of Technology
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KATASE Tetsuya
Meisyo Co.
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HATTORI Wataru
NEC Fundamental Research Labs
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KOMURO Masanori
Advanced Semiconductor Research Center, AIST
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Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Sasago Masaru
Matsushita Electric Industrial Co., Ltd. (Panasonic), 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
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Sasago Masaru
Matsushita Electric Industrial Co., 19 Kasugacho, Nishikujyo, Minamiku, Kyoto 601-8413, Japan
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Komuro Masanori
Advanced Semiconductor Research Center, AIST, 1-1 Umezono, 1-Chome, Tsukuba, Ibaraki 305-8501, Japan
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Katase Tetsuya
Meisyo Co., 148 Numa, Hikami-cho, Hikami-gun, Hyougo, Japan
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Van Look
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium
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Wiaux Vincent
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium
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Matsuo Takahiro
Matsushita Electric Industrial Co., 19 Kasugacho, Nishikujyo, Minamiku, Kyoto 601-8413, Japan
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Nakamatsu Ken-ichiro
Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo
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Nakamatsu Ken-ichiro
Graduate School of Science, LASTI, Himeji Institute of Technology, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Misaka Akio
Matsushita Electric Industrial Co., Ltd. (Panasonic), 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
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Irie Shigeo
Matsushita Electric Industrial Co., Ltd. (Panasonic), 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
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Watanabe Keiichiro
Graduate School of Science, LASTI, Himeji Institute of Technology, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Hattori Wataru
NEC Fundamental Research Labs, 34 Miyukigaoka, Tsukuba 305-8051, Japan
著作論文
- Study of Transmittance of Polymers and Influence of Photoacid Generator on Resist Transmittance at Extreme Ultraviolet Wavelength
- Measurement of Resist Transmittance at Extreme Ultraviolet Wavelength Using the Extreme Ultraviolet Reflectometer(Instrumentation, Measurement, and Fabrication Technology)
- “Mask Enhancer” Technology on ArF Immersion Tool for 45-nm-Node Complementary Metal Oxide Semiconductor with 0.249 μm2 Static Random Access Memory Contact Layer Fabrication
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography