Sasago Masaru | Matsushita Electric Industrial Co.
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概要
関連著者
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Sasago Masaru
Matsushita Electric Industrial Co.
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IRIE Shigeo
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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ENDO Masayuki
Matsushita Electric Industrial Co., Ltd. (Panasonic)
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Kametani Hitoshi
General Research Laboratory Mitubishi Electric Corporation
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Kondo H
The Institute Of Scientific And Industrial Research Osaka University
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ENDO Masamori
Department of Physics, School of Science, Tokai University
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Endo M
Department Of Physics School Of Science Tokai University
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Kondo Hideyuki
Central Research Institute Mitsubishi Materials Corporation
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MURAKAMI Katsuhiko
Nikon Corporation
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SASAGO Masaru
Matsushita Electric Industrial Co., Ltd. (Panasonic)
著作論文
- Study of Transmittance of Polymers and Influence of Photoacid Generator on Resist Transmittance at Extreme Ultraviolet Wavelength
- Measurement of Resist Transmittance at Extreme Ultraviolet Wavelength Using the Extreme Ultraviolet Reflectometer(Instrumentation, Measurement, and Fabrication Technology)
- “Mask Enhancer” Technology on ArF Immersion Tool for 45-nm-Node Complementary Metal Oxide Semiconductor with 0.249 μm2 Static Random Access Memory Contact Layer Fabrication
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography