SEINO Yutaka | National Institute of Advanced Industrial Science and Technology
スポンサーリンク
概要
関連著者
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SEINO Yutaka
National Institute of Advanced Industrial Science and Technology
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Ohdaira Toshiyuki
National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Suzuki Ryoichi
National Institute Of Advanced Industrial Science And Technology
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Shigesato Yuzo
Graduate School Of Science And Engineering Aoyama Gakuin University
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Hattori Koichiro
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 3, Tsukuba, Ibaraki 305-8563, Japan
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Oka Nobuto
Graduate School of Frontier Sciences, The University of Tokyo
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HATTORI Koichiro
National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST)
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山田 弘司
核融合科学研究所
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岡 伸人
青学大理工
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山田 啓文
京都大学工学研究科電子工学専攻
著作論文
- Low-k SiOCH Film Deposited by Plasma-Enhanced Chemical Vapor Deposition Using Hexamethyldisiloxane and Water Vapor
- Atomic Force Microscopy of Cracks on Si(100) and GaAs(100) Caused by Vickers Indenter
- Oxidation Resistance of Ti--Si--N and Ti--Al--Si--N Films Deposited by Reactive Sputtering Using Alloy Targets
- Low-$k$ SiOCH Film Deposited by Plasma-Enhanced Chemical Vapor Deposition Using Hexamethyldisiloxane and Water Vapor
- Thermal Conductivity of Amorphous Indium-Gallium-Zinc Oxide Thin Films