Variation of Growth Rate in InN Molecular-Beam-Epitaxy Growth Using Multiple Radio-Frequency Plasma Cells
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概要
- 論文の詳細を見る
Indium nitride (InN) thin films were grown on (0001) sapphire substrates in a molecular beam epitaxy apparatus with simultaneous operation of multiple radio-frequency nitrogen plasma cells. Growth rates of the obtained InN thin films were compared in terms of the growth temperature, indium Knudsen-cell temperature, and number of nitrogen plasma cells operated during the growth. Growth rate easily increased proportionately with the number of plasma cells without large deteriorations in the properties of the InN thin films.
- The Japan Society of Applied Physicsの論文
- 2013-08-25
著者
-
Sato Yuichi
Department Of Applied Chemistry Faculty Of Engineering Kanagawa University
-
Funaki Kosuke
Department of Electrical and Electronic Engineering, Graduate School of Engineering and Resource Science, Akita University, Akita 010-8502, Japan
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