Growth of high-indium-content InGaN:Mg thin films by MBE method with dual RF nitrogen plasma cells
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Mg-doped high-In-content In<inf>x</inf>Ga<inf>1−</inf><inf>x</inf>N (x ∼ 0.35) thin films were grown on a c-face sapphire substrate using an MBE apparatus having dual RF nitrogen plasma cells. The films showed p-type conduction under certain cell temperatures of Mg. The p-type conduction was confirmed by electrolyte-based capacitance–voltage measurement on an In<inf>x</inf>Ga<inf>1−</inf><inf>x</inf>N:Mg/In<inf>2</inf>O<inf>3</inf>/sapphire structure, in addition to thermo-electromotive force measurements.
- Institute of Physicsの論文
- 2014-09-29
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